Found Description
YOUR ROLE
As a Senior Process Engineer, you will be the technical owner of the Electro‑Chemical Plating (ECP) copper process on the LAM Novellus SABRE platform. You will drive process development and sustaining activities, working closely with equipment engineering to characterize hardware, resolve complex issues, and continuously improve process robustness, yield, and overall tool performance.
- Develop, optimize, and sustain ECP Cu reinforcement / damascene fill processes on Novellus SABRE tools.
- Define and tune recipes and hardware configurations to achieve target thickness, uniformity, fill performance, and defect levels.
- Collaborate with PVD barrier/seed and integration teams to ensure strong linkage between upstream processes (Ti, TiN, CVD‑TiN, Cu seed, etc.) and downstream ECP performance.
- Perform structured hardware and process characterization, including experiments on flow, contact design, waveform, and chemistry conditions...